Until recently, ASML was still permitted to sell DUV systems like the Twinscan NXT:2000i. SMIC has modified these devices to produce 7nm chips, and some reports have claimed 5nm is possible.

Despite some concern that China would quickly work around the restrictions, the head of toolmaker ASML says China's chip industry is stuck 10 to 15 years in the past. The most advanced sub-5nm ...