快科技12月18日消息，据报道，中电科电子装备集团下属红太阳光电公司自主研制的国内首台叠舟PECVD设备，近日成功发货。 在光伏电池的生产流程中 ...

The system meets all safety, facility and process requirements within the laboratory and pilot line production environments. The Orion III has many standard features not typically found on a system so ...

To deposit the AlOx layer it utilized an industrial batch-type LF-PECVD system provided by German ... this passivation sequence into our current process flow for POLO BJ solar cells has been ...

The ICP CVD process module has been developed to produce high-quality films from room temperature to 400 °C with high-density plasmas at low deposition temperatures and pressures. The PECVD process ...