ALD has also been employed to fabricate ultrathin tungsten nanobridges and we have examined their electrical and thermal conductivity [3]. We are also using ALE to make nano/micron-sized devices even ...
Tungsten disulfide (WSâ‚‚ ... Conventional atomic layer deposition (ALD)-based HZO deposition faces several challenges. One major issue is that during HZO deposition on the underlying electrode ...
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