PuroMaxx Cleaning Solutions - Brooks
网页The PuroMaxx 800 fully automatic 300mm FOUP cleaner combines the best particle and AMC cleaning performance and provides humidity control at the highest throughput. Vacuum decontamination chambers are integrated to the footprint and loaded by the robot.
PuroMaxx Contamination Control Solutions - Brooks
网页Brooks offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes.
Brooks Puromaxx 800 Fully Automatic 300Mm FOUP Cleaner
网页The PuroMaxx 800 fully automatic 300mm FOUP cleaner combines the best particle and AMC cleaning performance and provides humidity control at the highest throughput. Vacuum decontamination chambers are integrated to the footprint and loaded by the robot.
Reticle Handling | Solutions | Brooks - Brooks Automation
网页The Brooks PuroMaxx ™ 2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box, etc.
Brooks Semiconductor Connections’ Post - LinkedIn
网页The PuroMaxx™ 800 XP fully automated FOUP cleaner improves wafer yield by delivering best-in-class Volatile Organic Compound and Airborne Molecular Contaminant removal, as well as humidity ...
流量计说明 - 文档 - 布鲁克斯 Brooks Instrument | Brooks …
网页布鲁克斯仪器Brooks Instrument 各型号流量计仪表介绍说明。在线查询质量流量控制器、汽化、压力、半导体等产品介绍说明及相关软件。
Brooks Semiconductor Connections on LinkedIn: #foup …
网页Improved cleanliness is critical for enabling shrinking technology nodes. The PuroMaxx™ 800 300mm FOUP cleaner helps improve yield even at the highest…
Brooks Semiconductor Connections’ Post - LinkedIn
网页The PuroMaxx™ 800 fully automated 300mm FOUP cleaner minimizes the detrimental effects of airborne molecular and particle contamination to meet the most stringent cleanliness and productivity...
Pathway Upgrades | Services | Brooks - Brooks Automation
网页This service offering provides an upgrade path for Brooks PuroMaxx 800 XP and G2 customers looking to achieve improved pump reliability, more consistent vacuum process conditions, and higher water vapor capacity for significant …
布鲁克斯仪器 Brooks Instrument 官网 - 质量流量计专家 | Brooks Instrument
网页Brooks Instrument: Leader in Flow Meter and Mass Flow Control Technology. As the leading global mass flow control and flow meter manufacturer, Brooks Instrument offers the world’s most comprehensive line of precision flow control and flow measurement devices.