A high-performance planar piezoresistive accelerometer
Piezoresistive accelerometers are described that combine deep reactive ion etching and oblique ion implantation to form self-caging proof masses and flexures with vertical sidewalls and sidewall piezoresistive strain sensors. These devices deflect in-plane rather than out-of-plane, which allows one to form multiaxis accelerometers on one substrate.
In this paper, the design of a high-performance planar piezoresistive MEMS accelerometer is discussed in detail. The piezoresistive accelerometer possesses superior performance characteristics including low noise densities when measuring local structural responses characterized by high-frequency content.
Novel piezoresistive high-g accelerometer geometry with very …
2012年8月1日 · The accelerometer design presented in this paper is implemented as a MEMS device that features self-supporting piezoresistive elements. The first specimens have been characterized for shocks of up to 75,000 × g in Hopkinson bar experiments and have sensitivities ranging from 0.035 to 0.23 μV/V exc. / g and natural frequencies ranging from 2.7 ...
Piezoresistive Accelerometer Mathematical Model ... - IEEE Xplore
This paper is mainly focused on piezoresistive accelerometer performance improvement. Thus a new model of this sensor is derived to enhance its various parameters, such as precision, sensitivity, and reliability. Moreover, applying this model, a new design of piezoresistive accelerometer can be achieved.
Design and Characterization of CMOS Micromachined Piezoresistive …
Abstract: In this article, we present the design and characterization of monolithically integrated CMOS micromachined accelerometers utilizing polysilicon piezoresistors. Despite their lower piezoresistive effect compared to their singlecrystal counterpart, we achieve enhanced sensitivity by implementing thin support beams to amplify the ...
Abstract: This paper presents a design and development of a high-performance silicon piezoresistive MEMS accelerometer, with a finite element analysis (FEA) and low cross-axis sensitivity. Finite element analysis is used to simulate electro statically actuated piezoresistive accelerometer operating under dc conditions .The
Analysis and design of a novel piezoresistive accelerometer with ...
2016年8月15日 · A novel piezoresistive accelerometer was developed with high performance in sensitivity, resonant frequency and cross-axis sensitivity. The accelerometer chip with axially stressed self-supporting sensing beams has been designed, fabricated and tested in our study.
Design, fabrication and characterization of high performance
2013年9月6日 · This work comprises the analysis, design and development of micromachined SOI MEMS-based piezoresistive accelerometers for inertial sensing applications using minimalistic component design and a custom fabrication process to realize robust devices capable of withstanding more than ~106 cycles of error-free operation.
A micromachined piezoresistive accelerometer with high sensitivity ...
1999年12月1日 · In this study, a novel micromachined piezoresistive accelerometer with high sensitivity and high natural frequency was designed and modelled. Compared with capacitive and tunneling accelerometers, piezoresistive accelerometers generally have simple structures and readout circuitry, but their sensitivity is not as high as that of the capacitive ...
Analysis and design for piezoresistive accelerometer geometry ...
2013年8月7日 · Presented in this paper is the geometrical analysis and design for piezoresistive accelerometers. An improved figure of merit (FOM), considering sensitivity, resonant frequency and cross-axis sensitivity, is established to evaluate the sensor characteristics.