If the silane flow rate is increased in a PECVD silane oxide deposition process, what are the effects on deposition rate, refractive index, and film stress? | Numerade
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SOLVED: MCQ Low-Pressure CVD process isPhysical vapour deposition processChemical vapour deposition processSputtering processThermal evaporation processPlasma-Enhanced CVD process isPhysical vapour deposition processChemical vapour deposition processSputtering process RF sputtering processThermal evaporation process isPhysical vapour deposition processChemical vapour deposition process
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